The 2D layered materials are the potential components in next-generation semiconductor devices and quantum devices. For exploring possible applications of 2D layered materials, high-quality and large-scale materials grown by a gas-phase process are required. In this talk, I will introduce recent advances in metal-organic vapor phase epitaxy of 2D layered materials, including transition metal dichalcogenides, metal oxy-chalcogenides, and metal oxides. In addition, I will present the super-structure growth of selenium-based 3D II-VI and 2D TMDC.