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Van der Waals Oxide Heteroepitaxy for Transparent Soft Technology

Ying-Hao Chu*

* Department of Materials Science and Engineering, National Chiao Tung University, Hsinchu, 30010, Taiwan

In the research fields of IoT and robotics systems, a device with mechanical flexibility can deliver more degrees of freedom as far as the design aspects are concerned. Therefore, the development of soft and flexible electronics becomes an important research direction for wearable and IoT devices. Due to the mechanical flexibility, polymer materials and thin metal foils are commonly used in the fabrication of flexible electronic systems. However, the reliability issue under practical operations hinders the applications of these flexible electronics, especially for those on polymer-based substrates. A lot of researchers are working hard and together to expand the applicability of current flexible devices. However, new pathways to flexible electronics can also be developed in parallel to provide more subtle solutions, thus in need of a new platform to integrate functional materials with good thermal and chemical stabilities together with mechanical flexibility. In this research field, oxides can play an important role due to their intriguing functionalities and superior thermal and chemical stabilities. To deliver high-quality thin films or structures based on oxides, heteroepitaxy is essential. However, the lack of a suitable approach remains an obstacle for flexible oxide heteroepitaxy. van der Waals epitaxy (vdWE) involving two-dimensional layered materials can play a crucial role in the expansion of thin film epitaxy by overcoming the bottleneck of material combinations due to lattice/thermal matching conditions inherent to conventional epitaxy. In this talk, we confine ourselves to the validity of vdWE of functional oxides on muscovite mica throughout this treatise. With such demonstrations, it is anticipated that MICAtronics, vdWE on mica, can reveal unusual properties and emergent phenomena in the realm of high-performance flexible device applications.

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